Angle-resolved cathodoluminescence (ARCL) can be useful to capture the emission pattern of the light emitted from a specimen (angular distribution, θ, and Φ in polar coordinates). You can collect individual emission patterns from a few well-chosen points—typically giving the highest quality patterns. Or you can map and analyze a complete emission pattern at each point (pixel) of an image—analogous to spectrum imaging.

The workflow is as follows:

  1. Locate the region of interest within the sample.

  2. Set the desired SEM conditions.

  3. Ensure the alignment of the CL system to the SEM and sample is correct.

  4. Define the position of the electron beam.

  5. Acquire an emission pattern.

  6. Optimize the emission pattern (optional).

In the following section, we will focus on capturing an emission pattern and optimizing the system to maximize angular (and spectral) information and signal-to-noise ratio.

Click for the related spectrum imaging experiment.